Four-probe resistivity/square resistance tester is used to measure the semiconductor material (mainly silicon, germanium single crystal, silicon) resistivity, as well as the diffusion layer, epitaxial layer, ITO conductive foil membrane, conductive rubber sheet resistance of the measuring instruments. It is mainly measured by the electrical parts (referred to as: host), the test aircraft and the composition of four-probe head.
Mainframe technology to a number of
(1) measuring range:
Resistivity can be measured: 0.0001 ~ 19000Ω • cm
Sheet resistance can be measured: 0.001 ~ 1900Ω • □
(2) constant-current source:
Output current: DC 0.001 ~ 100mA continuously adjustable five-gear
Range: 0.001 ~ 0.01mA
0.01 ~ 0.10mA
0.10 ~ 1.0mA
1.0 ~ 10mA
10 ~ 100mA
Precision constant current: the files are less than ± 0.05%
(3) DC Digital Voltage Meter:
Measuring range: 0 ~ 199.99mV
Sensitivity: 10μV
Basic error: ± (0.004% full scale reading +0.01%)
Output power: ≥ 1000ΩM
(4) power supply:
AC 220V ± 10% 50/60 Hz Power: 12W
(5) the use of environment:
Temperature: 23 ± 2 ℃ relative humidity: ≤ 65%
Strong electric field without interference, without exposure to direct light
(6) weight, volume:
Host Weight: 7.5kg
Size: 365 × 380 × 160 (unit: mm in length × width × height)
Remarks:
Level measurements (resistivity measurements), precision of <3%
Electrical measurements (resistivity measurements), less than 0.3% accuracy
Remarks:
Apparatus including: a host; test aircraft (including the table) a; four-probe head 4; 20 four-probe